Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12158704 | Method of clamping a substrate to a clamping system, a substrate holder and a substrate support | Thomas POIESZ | 2024-12-03 |
| 11953837 | Method, substrate and system for estimating stress in a substrate | Thomas POIESZ, Michel Ben Isel HABETS, Herman Marquart | 2024-04-09 |
| 11898601 | Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method | Siegfried Alexander Tromp, Antonie Hendrik Verweij, Jan Pieter Van De Poel, Mark Constant Johannes Baggen | 2024-02-13 |