Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112949 | Highly etch selective amorphous carbon film | Rajesh Prasad, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Harry Whitesell +4 more | 2024-10-08 |
| 12014927 | Highly etch selective amorphous carbon film | Rajesh Prasad, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Harry Whitesell +4 more | 2024-06-18 |
| 11875995 | Techniques and apparatus for anisotropic stress compensation in substrates using ion implantation | Jun Lu, Qintao Zhang | 2024-01-16 |