Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12049697 | Multilayer ALD coating for critical components in process chamber | Chen-Hsiang Lu, Chiun-Da Shiue, Chih-Kai Hu | 2024-07-30 |
| 11984302 | Magnetic-material shield around plasma chambers near pedestal | Job George Konnoth Joseph, Sathya Swaroop Ganta, Kallol Bera, Andrew Nguyen, Jay D. Pinson, II +6 more | 2024-05-14 |