CH

Chih-Kai Hu

TSMC: 1 patents #2,264 of 4,162Top 55%
Overall (2024): #512,299 of 561,600Top 95%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12049697 Multilayer ALD coating for critical components in process chamber Ren-Guan Duan, Chen-Hsiang Lu, Chiun-Da Shiue 2024-07-30