Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12049697 | Multilayer ALD coating for critical components in process chamber | Ren-Guan Duan, Chen-Hsiang Lu, Chiun-Da Shiue | 2024-07-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12049697 | Multilayer ALD coating for critical components in process chamber | Ren-Guan Duan, Chen-Hsiang Lu, Chiun-Da Shiue | 2024-07-30 |