Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823858 | Dual source injector with switchable analyzing magnet | Wilhelm Platow | 2023-11-21 |
| 11798775 | Extended lifetime dual indirectly-heated cathode ion source | Wilhelm Platow, Jonathan David | 2023-10-24 |
| 11756772 | System and method for extending a lifetime of an ion source for molecular carbon implants | David Sporleder, Neil K. Colvin, Mike Ameen, Xiao Ping Xu | 2023-09-12 |
| 11728140 | Hydraulic feed system for an ion source | Joshua Abeshaus, David Sporleder, Neil K. Colvin, Joseph Valinski, Michael Cristoforo +2 more | 2023-08-15 |
| 11699565 | Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam | Neil K. Colvin, Edward Moore | 2023-07-11 |
| 11699563 | Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam | Neil K. Colvin, Xiao Ping Xu | 2023-07-11 |
| 11545330 | Ion source with multiple bias electrodes | Wilhelm Platow, Paul Silverstein, Marvin Farley, David Sporleder | 2023-01-03 |