XX

Xiao Ping Xu

AT Axcelis Technologies: 2 patents #5 of 21Top 25%
📍 Shanghai, CA: #186 of 450 inventorsTop 45%
Overall (2023): #95,126 of 537,848Top 20%
2
Patents 2023

Issued Patents 2023

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11756772 System and method for extending a lifetime of an ion source for molecular carbon implants David Sporleder, Neil J. Bassom, Neil K. Colvin, Mike Ameen 2023-09-12
11699563 Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam Neil K. Colvin, Neil J. Bassom 2023-07-11