Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756772 | System and method for extending a lifetime of an ion source for molecular carbon implants | David Sporleder, Neil J. Bassom, Mike Ameen, Xiao Ping Xu | 2023-09-12 |
| 11728140 | Hydraulic feed system for an ion source | Neil J. Bassom, Joshua Abeshaus, David Sporleder, Joseph Valinski, Michael Cristoforo +2 more | 2023-08-15 |
| 11699563 | Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam | Neil J. Bassom, Xiao Ping Xu | 2023-07-11 |
| 11699565 | Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam | Neil J. Bassom, Edward Moore | 2023-07-11 |