Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699565 | Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam | Neil K. Colvin, Neil J. Bassom | 2023-07-11 |