Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594417 | Etching method and apparatus | Kazuhito Miyata, Nobuhiro Takahashi, Shunta Furutani, Shoi SUZUKI | 2023-02-28 |
| 11581192 | Etching method and etching apparatus | Nobuhiro Takahashi | 2023-02-14 |