Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784054 | Etching method and substrate processing system | Kazuhito Miyata, Yasuo ASADA | 2023-10-10 |
| 11594417 | Etching method and apparatus | Kazuhito Miyata, Takehiko Orii, Shunta Furutani, Shoi SUZUKI | 2023-02-28 |
| 11581192 | Etching method and etching apparatus | Takehiko Orii | 2023-02-14 |