Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784054 | Etching method and substrate processing system | Nobuhiro Takahashi, Yasuo ASADA | 2023-10-10 |
| 11594417 | Etching method and apparatus | Nobuhiro Takahashi, Takehiko Orii, Shunta Furutani, Shoi SUZUKI | 2023-02-28 |