SF

Shunta Furutani

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #258,433 of 537,848Top 50%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11594417 Etching method and apparatus Kazuhito Miyata, Nobuhiro Takahashi, Takehiko Orii, Shoi SUZUKI 2023-02-28