Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842886 | Plasma processing method and plasma processing apparatus | Taro Ikeda, Hirokazu Ueda, Eiki KAMATA, Isao Gunji | 2023-12-12 |
| 11569558 | Directional coupler for use in a substrate processing apparatus, where the directional coupler includes a coaxial line coupled to a conductor on a substrate | Isao Takahashi, Hiroyuki Miyashita, Yuki Osada, Mitsuya Inoue | 2023-01-31 |