HU

Hirokazu Ueda

TL Tokyo Electron Limited: 2 patents #121 of 865Top 15%
Overall (2023): #150,882 of 537,848Top 30%
2
Patents 2023

Issued Patents 2023

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11842886 Plasma processing method and plasma processing apparatus Taro Ikeda, Eiki KAMATA, Mitsutoshi ASHIDA, Isao Gunji 2023-12-12
11615957 Method for forming boron-based film, formation apparatus Jinwang Li, Masahiro Oka, Yoshimasa Watanabe, Yuuki Yamamoto, Hiroyuki Ikuta 2023-03-28