Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842886 | Plasma processing method and plasma processing apparatus | Taro Ikeda, Eiki KAMATA, Mitsutoshi ASHIDA, Isao Gunji | 2023-12-12 |
| 11615957 | Method for forming boron-based film, formation apparatus | Jinwang Li, Masahiro Oka, Yoshimasa Watanabe, Yuuki Yamamoto, Hiroyuki Ikuta | 2023-03-28 |