Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842886 | Plasma processing method and plasma processing apparatus | Taro Ikeda, Hirokazu Ueda, Mitsutoshi ASHIDA, Isao Gunji | 2023-12-12 |
| 11784085 | Plasma processing apparatus | Taro Ikeda | 2023-10-10 |
| 11721528 | Plasma processing apparatus and control method | Taro Ikeda, Mikio Sato | 2023-08-08 |
| 11705310 | Plasma probe device, plasma processing apparatus, and control method | Taro Ikeda, Mikio Sato | 2023-07-18 |
| 11600475 | Plasma processing apparatus and control method | Taro Ikeda, Mikio Sato | 2023-03-07 |