Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749511 | Plasma observation system and plasma observation method | Ryoji Yamazaki, Mikio Sato | 2023-09-05 |
| 11569558 | Directional coupler for use in a substrate processing apparatus, where the directional coupler includes a coaxial line coupled to a conductor on a substrate | Isao Takahashi, Yuki Osada, Mitsuya Inoue, Mitsutoshi ASHIDA | 2023-01-31 |