Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699608 | Substrate storage apparatus, substrate storage method, and recording medium | Akihiro Matsumoto, Akira Murata, Minoru Tashiro | 2023-07-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699608 | Substrate storage apparatus, substrate storage method, and recording medium | Akihiro Matsumoto, Akira Murata, Minoru Tashiro | 2023-07-11 |