Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699608 | Substrate storage apparatus, substrate storage method, and recording medium | Akihiro Matsumoto, Michiaki Matsushita, Akira Murata | 2023-07-11 |
| 11628386 | Filtration device | Makoto Tashiro | 2023-04-18 |