Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11753714 | Washing method of semiconductor manufacturing device component having gas holes | Tomohiro MATSUMURA | 2023-09-12 |
| 11740830 | Information processing apparatus | — | 2023-08-29 |
| 11699608 | Substrate storage apparatus, substrate storage method, and recording medium | Michiaki Matsushita, Akira Murata, Minoru Tashiro | 2023-07-11 |