AM

Akira Murata

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #531,016 of 537,848Top 100%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11699608 Substrate storage apparatus, substrate storage method, and recording medium Akihiro Matsumoto, Michiaki Matsushita, Minoru Tashiro 2023-07-11