Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823865 | Plasma generation apparatus, deposition apparatus using the same, and deposition method | — | 2023-11-21 |
| 11710633 | Deposition method and deposition apparatus | — | 2023-07-25 |
| 11674225 | Substrate processing apparatus | Yukio Ohizumi, Manabu Honma, Takeshi Kobayashi | 2023-06-13 |
| 11664201 | Substrate holding mechanism and substrate processing apparatus | Toshiyuki Nakatsubo, Takeshi Kobayashi | 2023-05-30 |
| 11655539 | Film deposition apparatus and film deposition method | Tomoya Hasegawa | 2023-05-23 |
| 11572625 | Rotation detection jig, substrate processing apparatus and method of operating the substrate processing apparatus | Takeshi Kobayashi, Yukio Ohizumi | 2023-02-07 |