Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664201 | Substrate holding mechanism and substrate processing apparatus | Hitoshi Kato, Takeshi Kobayashi | 2023-05-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664201 | Substrate holding mechanism and substrate processing apparatus | Hitoshi Kato, Takeshi Kobayashi | 2023-05-30 |