Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11702747 | Rotation driving mechanism and rotation driving method, and substrate processing apparatus and substrate processing method using same | — | 2023-07-18 |
| 11674225 | Substrate processing apparatus | Hitoshi Kato, Yukio Ohizumi, Takeshi Kobayashi | 2023-06-13 |