Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11674225 | Substrate processing apparatus | Hitoshi Kato, Manabu Honma, Takeshi Kobayashi | 2023-06-13 |
| 11572625 | Rotation detection jig, substrate processing apparatus and method of operating the substrate processing apparatus | Takeshi Kobayashi, Hitoshi Kato | 2023-02-07 |