Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769652 | Devices and methods for controlling wafer uniformity in plasma-based process | Jr-Sheng Chen, An-Chi Li, Shih-Che Huang, Chih-Hsien Hsu, Zhi-Hao Huang +2 more | 2023-09-26 |
| 11655138 | Roughness selectivity for MEMS movement stiction reduction | Hsi-Cheng Hsu, Kuo-Hao Lee, Jui-Chun Weng, Ching-Hsiang Hu, Ji-Hong Chiang +4 more | 2023-05-23 |
| 11615946 | Baffle plate for controlling wafer uniformity and methods for making the same | Jr-Sheng Chen, An-Chi Li, Shih-Che Huang, Chih-Hsien Hsu, Zhi-Hao Huang +2 more | 2023-03-28 |