Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769652 | Devices and methods for controlling wafer uniformity in plasma-based process | Jr-Sheng Chen, An-Chi Li, Chih-Hsien Hsu, Zhi-Hao Huang, Ming-Chih Wang +2 more | 2023-09-26 |
| 11664333 | Method of manufacturing die seal ring | Shih-Hsien Chen, Ching-Li Yang, Chih-Sheng Chang | 2023-05-30 |
| 11615946 | Baffle plate for controlling wafer uniformity and methods for making the same | Jr-Sheng Chen, An-Chi Li, Chih-Hsien Hsu, Zhi-Hao Huang, Alex Wang +2 more | 2023-03-28 |