Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769652 | Devices and methods for controlling wafer uniformity in plasma-based process | Jr-Sheng Chen, An-Chi Li, Shih-Che Huang, Zhi-Hao Huang, Ming-Chih Wang +2 more | 2023-09-26 |
| 11615946 | Baffle plate for controlling wafer uniformity and methods for making the same | Jr-Sheng Chen, An-Chi Li, Shih-Che Huang, Zhi-Hao Huang, Alex Wang +2 more | 2023-03-28 |
| 11562968 | Apparatus for lithographically forming wafer identification marks and alignment marks | Hu-Wei Lin, Yu-Wei Chiu, Hai-Yin Chen, Ying-Hao Wang, Yu-Hen Wu | 2023-01-24 |