Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11562968 | Apparatus for lithographically forming wafer identification marks and alignment marks | Hu-Wei Lin, Chih-Hsien Hsu, Yu-Wei Chiu, Hai-Yin Chen, Ying-Hao Wang | 2023-01-24 |