Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11855214 | Inner spacers for gate-all-around semiconductor devices | Yu-Yun Peng, Fu-Ting Yen, Keng-Chu Lin, Tsu-Hsiu Perng | 2023-12-26 |
| 11848238 | Methods for manufacturing semiconductor devices with tunable low-k inner air spacers | Chen-Han Wang, Keng-Chu Lin, Shuen-Shin Liang, Tetsuji Ueno | 2023-12-19 |
| 11688766 | Seal material for air gaps in semiconductor devices | Shuen-Shin Liang, Chen-Han Wang, Keng-Chu Lin, Tetsuji Ueno | 2023-06-27 |
| 11626482 | Air spacer formation with a spin-on dielectric material | Chen-Han Wang, Keng-Chu Lin, Shuen-Shin Liang, Tsu-Hsiu Perng, Tsai-Jung Ho +3 more | 2023-04-11 |
| 11557483 | Semiconductor structure and manufacturing method thereof | Chia-Wei Su, Fu-Ting Yen, Teng-Chun Tsai | 2023-01-17 |