Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848238 | Methods for manufacturing semiconductor devices with tunable low-k inner air spacers | Chen-Han Wang, Keng-Chu Lin, Shuen-Shin Liang, Ting-Ting Chen | 2023-12-19 |
| 11688766 | Seal material for air gaps in semiconductor devices | Shuen-Shin Liang, Chen-Han Wang, Keng-Chu Lin, Ting-Ting Chen | 2023-06-27 |
| 11626482 | Air spacer formation with a spin-on dielectric material | Ting-Ting Chen, Chen-Han Wang, Keng-Chu Lin, Shuen-Shin Liang, Tsu-Hsiu Perng +3 more | 2023-04-11 |