Issued Patents 2023
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11626293 | Method of manufacturing a semiconductor device | Yen-Hao Chen, Wei-Han Lai, Chin-Hsiang Lin | 2023-04-11 |
| 11605538 | Protective composition and method of forming photoresist pattern | An-Ren Zi, Chin-Hsiang Lin | 2023-03-14 |
| 11581217 | Method for forming vias and method for forming contacts in vias | Tzu-Yang Lin, Cheng-Han Wu, Chin-Hsiang Lin | 2023-02-14 |
| 11550220 | Negative tone photoresist for EUV lithography | Li-Po YANG, Wei-Han Lai | 2023-01-10 |