Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664261 | Electrostatic chuck device | Masaki Ozaki, Keisuke Maeda | 2023-05-30 |
| 11551962 | Ceramic substrate and susceptor | Nobuhiro Hidaka, Naoto Kimura, Hironori Kugimoto | 2023-01-10 |