Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842914 | Composite sintered body, electrostatic chuck member, and electrostatic chuck device | Hironori Kugimoto | 2023-12-12 |
| 11817339 | Electrostatic chuck device and method for manufacturing same | Naoto Kimura | 2023-11-14 |
| 11784079 | Composite sintered body, electrostatic chuck member, and electrostatic chuck device | Hironori Kugimoto | 2023-10-10 |
| 11551962 | Ceramic substrate and susceptor | Mamoru Kosakai, Naoto Kimura, Hironori Kugimoto | 2023-01-10 |