Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848223 | Electrostatic chuck device and method for producing electrostatic chuck device | Masaki Ozaki, Takeshi Watanabe, Kentaro Takahashi | 2023-12-19 |
| 11842914 | Composite sintered body, electrostatic chuck member, and electrostatic chuck device | Nobuhiro Hidaka | 2023-12-12 |
| 11837489 | Electrostatic chuck device and production method for electrostatic chuck device | Norito MORISHITA | 2023-12-05 |
| 11784079 | Composite sintered body, electrostatic chuck member, and electrostatic chuck device | Nobuhiro Hidaka | 2023-10-10 |
| 11551962 | Ceramic substrate and susceptor | Mamoru Kosakai, Nobuhiro Hidaka, Naoto Kimura | 2023-01-10 |