Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848223 | Electrostatic chuck device and method for producing electrostatic chuck device | Hironori Kugimoto, Takeshi Watanabe, Kentaro Takahashi | 2023-12-19 |
| 11664261 | Electrostatic chuck device | Mamoru Kosakai, Keisuke Maeda | 2023-05-30 |