Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852981 | Frequency-picked methodology for diffraction based overlay measurement | Ming-Hsiao WENG | 2023-12-26 |
| 11841622 | Method and apparatus for diffraction-based overlay measurement | Yen-Liang Chen | 2023-12-12 |
| 11726413 | Overlay marks for reducing effect of bottom layer asymmetry | Kai-Hsiung Chen, Po-Chung Cheng | 2023-08-15 |
| 11656391 | Aperture design and methods thereof | Kai-Chiang Wu, Yen-Liang Chen, Kai-Hsiung Chen, Po-Chung Cheng, Chih-Ming Ke | 2023-05-23 |