Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764055 | Substrate processing method and substrate processing device | Toru Edo, Hiromichi KABA | 2023-09-19 |
| 11710629 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Yukifumi YOSHIDA | 2023-07-25 |