Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850623 | Substrate treating apparatus and substrate transporting method | Yuichi TAKAYAMA, Kazuhiko Nakazawa, Toshihito MORIOKA, Takuya Sato, Noriyuki KIKUMOTO | 2023-12-26 |
| 11764055 | Substrate processing method and substrate processing device | Nobuyuki Shibayama, Toru Edo | 2023-09-19 |