Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850623 | Substrate treating apparatus and substrate transporting method | Yuichi TAKAYAMA, Kazuhiko Nakazawa, Hiromichi KABA, Toshihito MORIOKA, Takuya Sato | 2023-12-26 |
| 11823921 | Substrate processing device and substrate processing method | Michinori IWAO, Shuichi Yasuda, Kazuhiro Fujita, Takahiro Yamaguchi | 2023-11-21 |
| 11823929 | Substrate treating apparatus | Yuzo Uchida, Hiroyuki Kawahara | 2023-11-21 |
| 11594436 | Substrate treating apparatus | Yuzo Uchida, Hiroyuki Kawahara | 2023-02-28 |
| 11581208 | Substrate treating apparatus | Yuzo Uchida, Hiroyuki Kawahara | 2023-02-14 |