Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823921 | Substrate processing device and substrate processing method | Shuichi Yasuda, Kazuhiro Fujita, Noriyuki KIKUMOTO, Takahiro Yamaguchi | 2023-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823921 | Substrate processing device and substrate processing method | Shuichi Yasuda, Kazuhiro Fujita, Noriyuki KIKUMOTO, Takahiro Yamaguchi | 2023-11-21 |