Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11829451 | Data processing method, data processing apparatus, and recording medium with data processing program recorded thereon | Hideji NAOHARA, Yumiko Hirato, Atsushi Sonoda | 2023-11-28 |
| 11710629 | Substrate processing apparatus and substrate processing method | Nobuyuki Shibayama, Yukifumi YOSHIDA | 2023-07-25 |