Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11710629 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Nobuyuki Shibayama | 2023-07-25 |
| 11543752 | Substrate processing method, substrate processing apparatus, and recipe selection method | Katsuya Akiyama, Song Zhang | 2023-01-03 |