Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705306 | Variable frequency and non-sinusoidal power generator using double side cooling, plasma processing apparatus including the same and method of manufacturing semiconductor device using the same | Hyunbae Kim, Hyunjae Lee, Youngdo Kim, Hyejin Kim, Chanhee Park +1 more | 2023-07-18 |
| 11545344 | Upper electrode and substrate processing apparatus including the same | Byungjo KIM, Jungmin Ko, Kwonsang Seo, Seungbo Shim, Younghyun JO | 2023-01-03 |