Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705306 | Variable frequency and non-sinusoidal power generator using double side cooling, plasma processing apparatus including the same and method of manufacturing semiconductor device using the same | Hyunjae Lee, Youngdo Kim, Hyejin Kim, Sangki Nam, Chanhee Park +1 more | 2023-07-18 |