Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11545344 | Upper electrode and substrate processing apparatus including the same | Byungjo KIM, Sangki Nam, Jungmin Ko, Seungbo Shim, Younghyun JO | 2023-01-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11545344 | Upper electrode and substrate processing apparatus including the same | Byungjo KIM, Sangki Nam, Jungmin Ko, Seungbo Shim, Younghyun JO | 2023-01-03 |