Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11795550 | Etching composition, a method of etching a metal barrier layer and a metal layer using the same, and method of manufacturing semiconductor device using the same | Jungah Kim, Mihyun PARK, Jinwoo Lee, Keonyoung Kim, Hoon Han +2 more | 2023-10-24 |
| 11610788 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Yungjun Kim, Jung-Min Oh +1 more | 2023-03-21 |