Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11733035 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Heath A. Pois, Lawrence V. Bot, Michael Kwan, Mark Klare, Charles Thomas Larson | 2023-08-22 |
| 11680915 | XPS metrology for process control in selective deposition | Charles Thomas Larson, Kavita Shah | 2023-06-20 |
| 11668663 | Method and system for non-destructive metrology of thin layers | Heath A. Pois, Mark Klare, Cornel Bozdog | 2023-06-06 |