Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852467 | Method and system for monitoring deposition process | Laxmi WARAD, Srinivasan Rangarajan | 2023-12-26 |
| 11733035 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Wei Ti Lee, Lawrence V. Bot, Michael Kwan, Mark Klare, Charles Thomas Larson | 2023-08-22 |
| 11668663 | Method and system for non-destructive metrology of thin layers | Wei Ti Lee, Mark Klare, Cornel Bozdog | 2023-06-06 |