Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854799 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Hiroshi Ashihara | 2023-12-26 |
| 11747789 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Shun MATSUI, Tadashi Takasaki | 2023-09-05 |
| 11728183 | Method of manufacturing semiconductor device | Hideharu Itatani, Naofumi Ohashi | 2023-08-15 |
| 11600488 | Method of manufacturing semiconductor device | Naofumi Ohashi | 2023-03-07 |