Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841343 | Method of processing substrate, substrate processing apparatus, method of manufacturing semiconductor processing apparatus, and recording medium | Teruo Yoshino, Toshiro Koshimaki | 2023-12-12 |
| 11747789 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Toshiyuki Kikuchi, Shun MATSUI, Tadashi Takasaki | 2023-09-05 |
| 11749550 | Method of manufacturing semiconductor device by setting process chamber maintenance enable state | Yasuhiro MIZUGUCHI, Tadashi Takasaki, Shun MATSUI | 2023-09-05 |
| 11728183 | Method of manufacturing semiconductor device | Hideharu Itatani, Toshiyuki Kikuchi | 2023-08-15 |
| 11664205 | Substrate processing apparatus | — | 2023-05-30 |
| 11600488 | Method of manufacturing semiconductor device | Toshiyuki Kikuchi | 2023-03-07 |